Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information
Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information
Assuring you our best, always

Batch Wafer Transfer System
​WHS300G

WHS300G is designed for wafer transferring, splitting, merging or flipping 6" and 8" wafer from the input cassette to the output cassette in batch mode. Input cassette type is SEMI standard open cassette with 26-slot, 25-slot and 13-slot. There are 4 load ports available with 3 inputs load ports and 1 output load port. The system is equipped with high accuracy reflective sensor for wafer protrusion detection.
Specifications
  • For 8" Wafers
  • 4x Open Cassette Station, split & merge lot between cassettes.
  • Wafer Notch Alignment.
  • Wafer Mapping, cross slot and double wafer detection.
  • Multi-axes Linear Motion for the handling of wafers.
  • Recipe controlled operation
  • Optional SECS/GEM communication with host computer system.
Please contact us for more information