Equipment Division - VMX

Model / Specs / Application

Loading Detection Section

Stress range: 1mN - 1500mN

Resolution: 0.3mN

Allowable Overload

3000% full scale

Friction Force Detection

Signal Output: Velocity Signal

Frequency Range: 20Hz - 10kHz

Excitation Section

Excitation Frequency: 45Hz

Width of Excitation: 0, 5, 10, 20, 40, 50, 80, 100µm

Radius of Stylus

5, 10, 15, 25, 50, 100µm

X - Z axis (scratch / loading direction drive)

Driving System: Steeping Motor Drive

Moving Range: 20mm

Drive Resolution: 0.5µm

(X) Moving Speed: 0 - 20µm/sec

(Z) Moving Speed: 0.1 - 1µm/sec0