Equipment Division - XRI

The Smallest & Toughest Raman Analyzer on the Planet! The ReporteR is a miniaturized, lower power version of the Inspector 300. It operates at 120 mW of laser power. Truly a palm-sized device, it also meets MilSpec 810G and IP67 standards for waterproof, dustproof and shock resistance.

The Inspector 300 features the standard 785 nm laser, with up to 300 mW of power. For many applications, the 300 is the perfect balance between good performance and lower pricing compared to other handheld Raman analysers. It meets industry expectations for resolution, signal/noise and analytical capability. The unit is designed for easy one-handed operation. It’s waterproof, dustproof and highly shock resistant. The comfortable thumb-wheel allows operation with gloves or other protective wear, without requiring the touchscreen for control. It’s designed to be washable and cleanable to avoid cross-contamination for testing different types of materials. The Inspector 300 is equipped with on-board chemometric and is compatible with common 3rd party packages.

The Inspector 500 is equipped with higher wavelength Raman excitation (1030 nm laser) for the specialized case of testing samples that exhibit high fluorescence. Especially for samples consisting of complex molecules or samples with a number of impurities. While such samples may pose as a challenge to the Inspector 300, the 500 allows for the specific Raman peaks to stand out in the spectrum. As with the rest of the SciAps Agent series of Raman analysers, the Inspector 500 offers high stability, the same intuitive software and interface, fast processing speed, and seamless report generation and data management.

The Z-300 is revolutionary. It’s the most portable, high performance LIBS analyser ever created. Its advanced technology includes a stacked, high resolution spectrometer that spans from 190 nm – 950 nm, thus covering the emission lines for every element from H to U. The spectrometer can be operated in either gated or ungated mode. It uniquely features an on-board argon purge to deliver higher-precision, quantitative results; laser burst surface cleaning and rastering to eliminate grinding or surface prep and improved accuracy. The Z’s Android-based operating system is as friendly and intuitive as a Smartphone, and it supports numerous analytical Apps for a variety of sample types.

The Z-200 is the most portable, high performance LIBS analyser ever created. Its advanced technology includes on-board argon purge to deliver quantitative results; laser burst surface cleaning to eliminate grinding or surface prep; laser rastering for improved precision. It’s Android-based operating system is as friendly and intuitive as a Smartphone, and it supports numerous analytical Apps for a variety of sample types.

The X-50 is our most economical model. Great basic analysis of transition and heavy metals. Similar with the X-100 model, X-50 is designed with older PiN diode detector technology. Although test times will be much longer to achieve the same precision as X-100, the X-50’s is more affordable & economical compared to other X Series.

The X-300 is our premium XRF in terms of speed, precision, limit of detection and elemental range. Delivering best performance on Rare-earths, RCRA and Priority Pollutant metals due to premium detector and high rates.

X-200 offers comparable speed/precision as top of the line competing brands, at a lower price point, in a smaller, lighter package. Best value where aluminium sorting is daily but not the major focus.

This X-100 Offers high speed and precision and excellent limits of detection on transition metals (base metals) and heavy metals, SDD technology.

Rigakus unique AZX400 sequential wavelength dispersive X-ray fluorescence (WDXRF) spectrometer was specifically designed to handle very large and /or heavy samples. Accepting samples up to 400mm diameter, 50 mm thick and 30kg weight, this system is ideal for analyzing sputtering targets, magnetic disks, or multilayer film metrology or elemental analysis of large samples.

Wafer surface contamination monitoring system for wafer-fab process (cleaning, litho, etch, ashing, TF, etc) Sweeping TXRF Enables mapping of contaminant distribution over entire wafer. ZEE-TXRF enables measurements up to wafer zero edge exclusion. BAC-TXRF enables automated non-contact flipping of 300mm wafers from front-side to back-side for TXRF measurements. Capable to import measurement coordinates from defect inspection tools for follow-up analysis.

The WDA-3650 X-ray fluorescence spectrometer for thin eveluation continues Rigaku's 30-year history of XRF wafer analyzers that has mirrored the history of thin film device development. This latest XRF metrology tool contributes significantly to the process control of metal film thickness, film composition, and element concentration with new functions and a low-COO design.

The Rigaku MFM310 performs high-precision measurements not possible by optical or ultrasonic techniques. This sophisticated X-ray metrology tool makes it practical to perform high-throughput measurements on product and blanket wafers ranging from ultra thin single-layer films to multilayer stacks.