Manufacturing Division - Creden

Model / Specs / Application

Footprint

1920(L) x 900(W) x 2050(H)mm

Wafer Size

150mm & 200mm Silicon wafer

Input Cassette (Type)

SEMI Standard Open Cassette with 13-slot, 25-Slot, 26-Slot

Load Ports

4,3 input and 1 output

System Control and UI

Standard Industrial PC

LCD Wide Screen Monitor

Windows OS

CREDEN Hybrid Motion Control And IO Card

Hepa Filter System

Power

230V AC ± 10% @ 13A 50Hz

Power Core

Three Pins With Single Phase

Temperature

20°C - 28°C