Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information
Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information
Assuring you our best, always

Wafer Packing System
WHS3200

Designed for automatic wafer transfer between shipping carriers (canister, wafer jar and etc) and semi-standard open cassettes.​
Specifications
  • For 6" & 8” Wafers
  • 3x Open Cassettes Station Split & Merge Lot between cassettes.
  • 3x Wafer Carrier Station (2x for canister, 1x for Wafer Jar)
  • Built-in Hirata Wafer Pre-Aligner (6 & 8” wafers)
  • IOSS or Cognex OCR Reader
  • ATM Robotic Arm with Flip Axis (Optional Dual Arm)
  • Built-in color sensor for the wafer, interleave paper or spacer detection.
  • Built-in height sensor on Canister Port for accurate robotic handling. 
  • Optional vision sensor for wafer breakage detection.
  • Optional non-contact wafer handling (cyclone or bernoulli technique)
  • Optional SESC-GEM Interfaces
  • Number of Load Port can be customized.
Please contact us for more information
Please contact us for more information