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2nd Optical Inspection System
DIS8000

Specifications
  • Single Wafer Autoloader for 200 and 300mm Wafer Size
  • One Load Port for Standard Open Cassette
  • High Power Microscope with Five Objectives (In the Range of 2.5x to 50x)
  • Motorized Stage for XY Movements
  • Decoding on Customer Wafer Map to QMC Mapping System
  • Image Capturing System
  • User-Defined Reject Code & Summary Lot Report after Inspection
  • Built-in Barcode Scanner for Wafer Map Download/Upload Process from Server
Please contact us for more information