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Ceramic Parts

We supply and refurbish semiconductor tool's key components such as valves, bellows and heaters through continued research and development. Our bellow is certified OPM for major OEM valves and  Thin film heater makers in the industry.
Specifications
  • Machines: A MAT, LAM, NOVELLUS, SMC, VAT, ULVAC
  • CVD: Vacuum valves, Bellows
  • Etch: Vacuum valves, Bellows
  • Sputtering: Thin film heaters, Bellows, Vacuum valves
  • Refurbishment Services: Thin firm heaters, Vacuum Valves
Please contact us for more information