Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information
Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information
Assuring you our best, always

Non-Contact Surface Profiling System
 MP2100

The MP2100 is Chapman Instruments’ latest high-resolution profiler. Specially designed for surface measurements and analysis, it can be used as both a production tool for inline quality inspection, as well as a research and development tool for establishing standards and researching tolerances.

The MP2100 utilizes the same non-contact measurement technology as other Chapman profilers. Users can make either high-resolution linear or circular scans quickly. The powerful, yet user-friendly, Windows® based operational software can be programmed to execute a series of routines and report the data off-line for further analysis. Password security and event viewer/error logging are standard with Chapman software.

Robotic handling for 150 mm, 200 mm and 300 mm wafers is available as an option.

Key Features
  • Non-contact scanning
  • 0.01 nm height resolution
  • 50 nm data sampling
  • 0.50 µm lateral resolution
  • Fast, complete circular scans (360° around wafer surface)
  • Nomarski Viewing System for high definition visual inspection
  • Scan lengths ranging from µm to complete circumferences (200 or 300 mm wafer)
  • Roughness and waviness data from a single scan
  • Non-contact 3D scans
  • Automated sample positioning (X, Y, theta)
Specifications
  • Vertical resolution:  0.01nm
  • Horizontal resolution:  0.5µm
  • Linear Scan Length:  Complete circumference of wafer
  • X and Y stage resolution:  1µm
  • Theta Stage Resolution:  0.001°
  • Data Sampling:  50 nm (minimum)
Please contact us for more information