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TXRF 310
TXRF Wafer Surface Contamination 

Specs & Applications
  • Size of wafer: 300 mm, 200 mm, and 150 mm
  • Rotating-anode X-ray source
  • Sample stage: XY θ stage
  • Solid-state detector
  • Oil-free electrical transformer
  • Three-beam excitation
  • Automatic optics alignment
  • Data import from external surface defect inspection tool
Please contact us for more information