Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information
Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information
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Wafer Batch Transfer System
​WTS100G

WTS100G is designed for transferring, splitting, merging or flipping the 4” wafer and 6” wafer from the input cassette in batch mode. It consists of two load ports which one input load ports and one output load port. The load port equipped with high precision sensor for wafer mapping detection and cassette placement detection. The sorting method for this tools, the wafers transfer from 4” SEMI Standard Open Cassette to 4” SEMI Standard Open Cassette/ Clamshell or 6” SEMI Standard Open Cassette to 6” SEMI Standard Open Cassette/Clamshell.
Specifications
  • Designed for 100mm & 150mm Wafer Size
  • Cassette Type : SEMI Standard Open Cassette & Clamshell
  • Consist of Two Load Ports (One Input and One Output)
  • Built-in Programmable Wafer Orientation Flat Alignment
  • In-Cassette Wafer Mapping Function
  • Batch Wafer Transfer from Input Cassette to Output Cassette
  • Single Wafer Sorting (Sequential Wafer Arrangement)
  • Batch Wafer Merging (Odd + Even Slots)
  • IOSS Wafer ID Reader
  • TCP/IP Networking For Interface With Host Map Server, and Storage Of Map Data Over The Network
  • SECS/GEM Communication Tools (Optional)
Please contact us for more information