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Wafer Batch Transfer System
​WTS100G

Specifications  
  • Designed for 100mm & 150mm Wafer Size
  • Cassette Type: SEMI Standard Open Cassette & Clamshell
  • Consist of Two Load Ports (One Input and One Output)
  • Built-in Programmable Wafer Orientation Flat Alignment
  • In-Cassette Wafer Mapping Function
  • Batch Wafer Transfer from Input Cassette to Output Cassette
  • Single Wafer Sorting (Sequential Wafer Arrangement)
  • Batch Wafer Merging (Odd + Even Slots)
  • TCP/IP Networking For Interface With Host Map Server, and Storage Of Map Data Over The Network
  • SECS/GEM Communication Tools (Optional)
Please contact us for more information