Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information
Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information
Assuring you our best, always

Wafer Packing System
WHS3800

WHS3800 is designed to handle 8" and 12" wafer size for packing and unpacking wafer. It comes with 2 port for Open Cassette and 2 ports for Canister. The system is equipped with Wafer Pre-Aligner for wafer positioning accuracy and orientation. It comes with the built-in Vision Sensor and Height Sensor for robotic wafer handling accuracy. WHS3800 is capable of splitting, merging and sorting the wafers.
Specifications
  • Comes with2 x FOUP/FOSB for 12" Wafer and Open Cassette for 8" Wafer and integrated Wafer Protrusion  Detection Sensor and Thru-Beam Wafer Mapping
  • 2 x Universal shipping carrier station for various type of canister and wafer jar with auto-detection for 8" & 12" wafer size
  • 1 x Interleaf paper port (Auto-conversion between 8" and 12" Paper) \
  • Built-in vision system for wafer, interleaf paper or spacer detection and built-in height sensor for robotic handling accuracy
  • cartesian robot module for wafer jar handling (Optional)
  • Wafer ring separator handling module for canister (Optional)
Please contact us for more information