Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information
Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information
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Wafer Packing System
​WPS3200

WPS3200 is designed to handle 6” & 8” wafer for packing & unpacking process from various type of shipping carriers. The system comes with two load ports for 6” Semi-Standard Open Cassette and 8” Semi-Standard Open Cassette, two load ports for 6” Canister and 8” Canister and one port for interleaf paper (Auto- Conversion for 6” and 8” wafers). WPS3200 comes with built-in vision sensor for the wafer, interleaf paper or ring spacer detection and built-in height sensor for robotic handling accuracy. Mapping sensor integrated into the robotic arm to detect any wafer cross slot and double wafers during operation.
Specifications
  • 2 x Open Cassettes Station with Integrated Wafer Protrusion Detection Sensor (Universal for both 6” & 8”)
  • 2x Wafer Canister Station (Configurable to 1x Canister and 1x Wafer Jar with Optional Cartesian Robot Module)
  • 1x Interleaf Paper Port (Auto-Conversion between 6” & 8”)
  • Hirata 4-Axis Robotic Arm with Wafer Flipping Feature.
  • Built-in Color Sensor for Wafer, Interleaf Paper or Ring Spacer Detection and Built-in Height Sensor on Canister & Wafer Jar Loading Port for Robotic Handling Accuracy. (1x Height Sensor on “Separator Canister” Port.)
  • Cartesian Robot Module for Wafer Jar Handling(Optional)
  • Wafer Ring Separator Handling Module for Canister. (Optional)
Please contact us for more information
Please contact us for more information