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Wafer Sorting System

  • Designed for SEMI Standard of 6” & 8” Open Cassette
  • Comes with four load ports
  • Dual arm Hirata Automatic Wafer Loader/Unloader (Robot) with built in Wafer Mapping Sensor
  • Wafer Pre-Aligner for orientation check & wafer alignment and programmable wafer ID reader
  • Programmable wafer sorting recipe & robot controller
  • Programmable sorting method such as Wafer ID Sorting, Sequential Sorting,
  1.        Slot to Slot Sorting, Drag and Drop and Sub-Lot Sorting
  • TCP-IP & RS232 data interfaces/ SECS/GEM data communication (Optional)
Please contact us for more information