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Wafer Sorting System

WSS8000 is designed to transfer the  wafer from the input cassette to output cassette. The machine is designed with two standard load ports that able to fit 8” Semi-Standard Open Cassette, 12” FOUP Cassette and 12” FOSB Cassette.  The mapping sensor in the system is able to detect any wafer cross slot in the cassette. Robotic arm integrated with the end effector which is using Bernoulli or Vacuum Suction type (depending on the wafer features) to transfer the wafer to output cassette. WSS8000 is able to perform wafer transfer with five sorting method which are wafer ID sorting, Wafer ID Sorting, Sequential Sorting, Drag & Drop Sorting, Sub-lot Wafer Sorting and Slot to Slot Sorting.
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